Improved characteristics of (11 2‾2) plane AlGaN films grown on SiNx interlayer
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Published:2024-10
Issue:
Volume:181
Page:108655
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ISSN:1369-8001
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Container-title:Materials Science in Semiconductor Processing
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language:en
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Short-container-title:Materials Science in Semiconductor Processing
Author:
Dai QianORCID,
Zhang Xiong,
Zhang Lingling,
Qi Zhengqing,
Chen Peng,
Wang Shuchang