Investigation of strontium tantalate thin films for high-k gate dielectric applications
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference11 articles.
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5. SrTa2O6 thin films for high-K dielectric applications grown by chemical vapor deposition on different substrates
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1. Influence of Boron Doping on the Dielectric Characteristics of Eu3+-Doped β-SrTa2O6 and Eu3+-Doped BaTa2O6 Tungsten Bronze-Type Ceramics;Journal of Electronic Materials;2024-07-17
2. Electro‐optical performances of nanostructured SrTiO x films: The effect of plasma power, Ar/O 2 ratio and annealing;International Journal of Applied Ceramic Technology;2021-02-08
3. Local structure and dielectric behavior of tetragonal tungsten bronzes β-SrTa2O6 and β′-SrTa2O6;Journal of the Ceramic Society of Japan;2015
4. Effects of Si and Ti impurities on electrical properties of sol–gel-derived amorphous SrTa2O6 thin films by UV/O3 treatment;Applied Physics A;2012-11-16
5. Thermally Stimulated Current Analysis of Defects in Sol–Gel Derived SrTa$_{2}$O$_{6}$ Thin-Film Capacitors;Japanese Journal of Applied Physics;2012-09-20
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