Potential of micrometer-sized graphite as a catalyst for chemical etching of silicon
Author:
Funder
JSPS
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference43 articles.
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3. Metal-assisted chemical etching of silicon in HF–H2O2;Chartier;Electrochim. Acta,2008
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5. Metal assisted chemical etching for high aspect ratio nanostructures: a review of characteristics and applications in photovoltaics;Li;Curr. Opin. Solid State Mater. Sci.,2012
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