Hydride vapor phase epitaxy of high structural perfection thick AlN layers on off-axis 6H-SiC

Author:

Volkova Anna,Ivantsov Vladimir,Leung Larry

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference16 articles.

1. GaN/AlGaN HEMTs grown by hydride vapor phase epitaxy on AlN/SiC substrates

2. An AlGaN/GaN high-electron-mobility transistor with an AlN sub-buffer layer

3. T. Kikkawa, K. Imanishi, M. Kanamura, K. Joshin, in: Proceedings of CS MANTECH Conference, April 24–27, 2006, Vancouver, British Columbia, Canada, pp. 171–174.

4. Y. Kumagai, H. Shikauchi, J. Kikuchi, T. Yamane, Y. Kangawa, A. Koukitu., Is it possible to grow AlN by hydride vapor phase epitaxy? in: Proceedings of 21st Century COE Joint Workshop on Bulk Nitrides, IPAP Conference Series 4, Japan Society of Applied Physics, June 2 and 3, 2003, Tokyo, Japan. Tokyo, The Institute of Pure and Applied Physics (IPAP), 2004. (IPAP Conference Series 4), pp. 9–13.

5. Epitaxially grown AlN and its optical band gap

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