MOVPE growth of AlN films on nano-patterned sapphire substrates with annealed sputtered AlN-Reference-Cited by-同舟云学术

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MOVPE growth of AlN films on nano-patterned sapphire substrates with annealed sputtered AlN

Published:2020-02 Issue: Volume:532 Page:125397
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Iba Yukino,Shojiki Kanako,Uesugi Kenjiro,Xiao Shiyu,Miyake Hideto

Funder

Japan Society for the Promotion of Science

Japan Science and Technology Agency

Ministry of Education, Culture, Sports, Science and Technology

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference29 articles.

1. An aluminium nitride light-emitting diode with a wavelength of 210 nanometres

2. Intentional control of n-type conduction for Si-doped AlN and AlXGa1−XN (0.42⩽x<1)

3. Fabrication of Deep-Ultraviolet-Light-Source Tube Using Si-Doped AlGaN

4. AlGaN Deep-Ultraviolet Light-Emitting Diodes with External Quantum Efficiency above 10%

5. Improvement in Output Power of 280-nm Deep Ultraviolet Light-Emitting Diode by Using AlGaN Multi Quantum Wells

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Epitaxy of (11–22) AlN Films on a Sputtered Buffer Layer with Different Annealing Temperatures via Hydride Vapour Phase Epitaxy;Materials;2024-01-09

2. Two-dimension Al2O3-AlN heterogeneous nanosheets as bifunctional host materials for kinetics-accelerated and dendrite-free lithium-sulfur batteries;Electrochimica Acta;2023-10

3. Micro- and Nanostructure Analysis of Vapor-Phase-Grown AlN on Face-to-Face Annealed Sputtered AlN/Nanopatterned Sapphire Substrate Templates;Journal of Electronic Materials;2023-03-29

4. Evolution of microstructure, stress and dislocation of AlN thick film on nanopatterned sapphire substrates by hydride vapor phase epitaxy;Chinese Physics B;2023-02-01

5. Effect of V–III Ratio‐Based Growth Mode on the Surface Morphology, Strain Relaxation, and Dislocation Density of AlN Films Grown by Metal‐Organic Chemical Vapor Deposition;physica status solidi (b);2022-09-04

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