Nucleation and phase formation during reactive magnetron co-sputtering of Cu(In,Ga)S2 films, investigated by in situ EDXRD

Author:

Schulte Jonas,Brunken Stephan,Ellmer Klaus

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference31 articles.

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3. In situ investigation by energy dispersive X-ray diffraction (EDXRD) of the growth of magnetron sputtered ITO films;Ellmer;Surface and Coatings Technology,2001

4. Setup for in situ X-ray diffraction studies of thin film growth by magnetron sputtering;Ellmer;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment,2001

5. Reactive magnetron sputtering of molybdenum sulfide thin films: in situ synchrotron x-ray diffraction and transmission electron microscopy study;Weiss;Journal of Applied Physics,2004

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