In situ investigation by energy dispersive X-ray diffraction (EDXRD) of the growth of magnetron sputtered ITO films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference10 articles.
1. Semiconducting Transparent Thin Films;Hartnagel,1995
2. Annual Review of Material Science, vol. 7;Thornton,1977
3. Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic properties
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