Author:
Habuka Hitoshi,Suzuki JunPei,Takai Yusuke,Hirata Hironobu,Mitani Shin-Ichi
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference12 articles.
1. Growth of Silicon Crystals by a Vapor Phase Pyrolytic Deposition Method
2. Silicon Epitaxy,2001
3. Chemical process of silicon epitaxial growth in a SiHCl3–H2 system
4. Model on transport phenomena and epitaxial growth of silicon thin film in SiHCl3H2 system under atmospheric pressure
5. H.V. Santen, C.R. Kleijn, H.E.A. Van den Akker, in: V.V. Kudriavtsev, W. Cheng, C.R. Kleijn, S. Wano, M. Souli (Eds.), Computational Technologies for Fluid/Thermal Structure/Chemical Systems with Industrial Applications, ASME International, New York, USA, 1989, p. 211.
Cited by
27 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献