Nonlinear model-based control of the Czochralski process I: Motivation, modeling and feedback controller design
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference72 articles.
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5. A comparative study of thermal stress induced dislocation generation in pulled GaAs, InP, and Si crystals;Jordan;J. Appl. Phys.,1981
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