Influence of molybdenum bottom electrodes on crystal growth of aluminum nitride thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference28 articles.
1. Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial Films
2. Effects of bottom electrodes on the orientation of AlN films and the frequency responses of resonators in AlN-based FBARs
3. Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications
4. Measurements of the bulk, C-axis electromechanical coupling constant as a function of AlN film quality
5. Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators
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