Effect of electron injection on the parameters of a pulsed planar magnetron-Reference-Cited by-同舟云学术

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Effect of electron injection on the parameters of a pulsed planar magnetron

Published:2019-01 Issue: Volume:159 Page:200-203
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Shandrikov Maxim V.,Bugaev Alexey S.,Oks Efim M.^ORCID,Ostanin Alexander G.,Vizir Alexey V.^ORCID,Yushkov Georgy Yu.^ORCID

Funder

State research program of HCEI

Russian Ministry of Science and High Education project

Efim Oks is the participant of research program “Leading Scientist”

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference18 articles.

1. Glow Discharge Processes;Chapman,1976

2. Thin Film Processes,1978

3. Perspectives on oblique angle deposition of thin films: from fundamentals to devices;Barranco;Prog. Mater. Sci.,2016

4. The investigation of thermal stability of Al/NbMoN/NbMoON/SiO2 solar selective absorbing coating;Songa;Sol. Energy Mater. Sol. Cells V.,2017

5. Development and characterisation of novel anti-bacterial S-phase based coatings;Formosa;Thin Solid Films,2017

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1. Enhancement of ionized metal flux fraction without compromising deposition rate in industrial magnetron sputtering;Surface and Coatings Technology;2024-08

2. Enhancement of Ionised Metal Flux Fraction Without Compromising Deposition Rate in Industrial Magnetron Sputtering;2024

3. Planar Magnetron with Electron Injection and Reflective Electrode: Numerical Simulation of Functioning Processes;Plasma Physics Reports;2023-02

4. Numerical modeling of discharge characteristics of a planar magnetron with injection of electrons from auxiliary discharge;Journal of Physics: Conference Series;2022-07-01

5. Planar magnetron discharge with confinement of injected electrons;Vacuum;2021-10

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