Enhancement of ionized metal flux fraction without compromising deposition rate in industrial magnetron sputtering
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Published:2024-08
Issue:
Volume:489
Page:131142
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ISSN:0257-8972
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Container-title:Surface and Coatings Technology
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language:en
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Short-container-title:Surface and Coatings Technology
Author:
Klein PeterORCID,
Hnilica JaroslavORCID,
Sochora Vjačeslav,
Souček PavelORCID,
Fekete MatejORCID,
Vašina PetrORCID