Numerical modeling of discharge characteristics of a planar magnetron with injection of electrons from auxiliary discharge

Abstract

Abstract We present here a numerical model of a planar magnetron with electron injection from the plasma of an auxiliary discharge with the hollow cathode. The model is based on solving a system of stationary equations using the method of successive approximations. The model takes into account the effects of the current of the injected electrons, the operating gas pressure, the magnetic field induction, the flow of the target material into the plasma, and the change in the plasma mass-to-charge composition due to cathode sputtering by ion bombardment. Typical volt-ampere characteristics of a magnetron discharge with electron injection, as well as the mass-to-charge composition of the created gas-metal plasma, are calculated.