Numerical Models of the Planar Magnetron Glow Discharges-Reference-Cited by-同舟云学术

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Numerical Models of the Planar Magnetron Glow Discharges

Published:2004-11 Issue:7-8 Volume:44 Page:582-588
ISSN:0863-1042
Container-title:Contributions to Plasma Physics
language:en
Short-container-title:Contrib. Plasma Phys.

Author:

Kolev I.,Bogaerts A.

Publisher

Wiley

Subject

Condensed Matter Physics

Reference18 articles.

1. Model of the cathode fall region in magnetron discharges

2. Longitudinal distribution of plasma density in the low-pressure glow discharge with transverse magnetic field

3. Study of the plasma pre-sheath in magnetron discharges dominated by Bohm diffusion of electrons

4. Analysis of a one-dimensional, steady-state magnetron discharge

5. The cylindrical DC magnetron discharge: I. Particle-in-cell simulation

Cited by 31 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Numerical framework for multi-scale modeling planar DC magnetron sputtering;Vacuum;2023-07

2. A fluid model of pulsed direct current planar magnetron discharge;Scientific Reports;2023-06-03

3. Particle-in-Cell Simulations for the Improvement of the Target Erosion Uniformity by the Permanent Magnet Configuration of DC Magnetron Sputtering Systems;Coatings;2023-04-07

4. A Fluid Model of Pulsed Direct Current Planar Magnetron Discharge;2023-04-03

5. Numerical modeling of discharge characteristics of a planar magnetron with injection of electrons from auxiliary discharge;Journal of Physics: Conference Series;2022-07-01

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