Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference42 articles.
1. Review article: tracing the recorded history of thin-film sputter deposition: from the 1800s to 2017;Greene;J. Vac. Sci. Technol. A,2017
2. Magnetron sputtering: a review of recent developments and applications;Kelly;Vacuum,2000
3. Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies;Behrisch,2007
4. Handbook of Deposition Technologies for Films and Coatings : Science, Applications and Technology;Martin,2010
5. Magnetron sputtering – milestones of 30 years;Bräuer;Vacuum,2010
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2 articles.
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