Author:
Shandrikov M.V.,Artamonov I.D.,Bakeev I.Yu.,Bugaev A.S.,Oks E.M.,Vizir A.V.,Yushkov G. Yu
Funder
Russian Science Foundation
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference22 articles.
1. High power impulse magnetron sputtering discharge.//J;Gudmundsson;Vac. Sci. Technol. A,2012
2. Short- and long-term plasma phenomena in a HiPIMS discharge.//plasma sources sci;Poolcharuansin;Technol.,2010
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