In-situ non-destructive removal of tin particles by low-energy plasma for imitation of EUV optical mirrors self-cleaning-Reference-Cited by-同舟云学术

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In-situ non-destructive removal of tin particles by low-energy plasma for imitation of EUV optical mirrors self-cleaning

Published:2023-06 Issue: Volume:212 Page:111963
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Wang Sishu^ORCID,Ye Zongbiao,Pu Guo,Liu Jianxing,Yang Li,Jing Wenna,Yu Mingming,Yang Fangling,Peng Yichao^ORCID,Gou Fujun,Wei Jianjun^ORCID

Funder

National Key Research and Development Program of China

Sichuan Province Science and Technology Support Program

Sichuan University

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference29 articles.

1. Lithography for now and the future;van de Kerkhof;Solid State Electron.,2019

2. EUV Sources for Lithography;Bakshi,2006

3. Determination of charge state, energy and angular distributions of tin ions emitted from laser produced plasma based EUV sources;Morris;J. Phys. Conf.,2007

4. Debris mitigation and cleaning strategies for Sn-based sources for EUV lithography;Klunder;Emerg. Lithograph. Technol.,2005

5. In situ collector cleaning and extreme ultraviolet reflectivity restoration by hydrogen plasma for extreme ultraviolet sources;Elg;J. Vac. Sci. Technol.,2016

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Vacuum cleaning of amorphous carbon using hydrogen plasma for EUV lithography;Materials Science and Engineering: B;2024-09

2. Investigation of an electrode-driven hydrogen plasma method for in situ cleaning of tin-based contamination;Plasma Science and Technology;2024-08-01

3. Removal mechanism and cleaning method of electroplating masking paint with a microwave plasma jet;Journal of Manufacturing Processes;2024-08

4. Detection of carbon contamination in EUV multilayer mirrors based on secondary electrons;Vacuum;2024-03

5. First principles study on strain effect of hydrogen diffusion and dissolution behavior in Ruthenium;International Journal of Hydrogen Energy;2024-01

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