Determination of charge state, energy and angular distributions of tin ions emitted from laser produced plasma based EUV sources.
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/58/i=1/a=089/pdf
Reference6 articles.
1. Improved reflectance and stability of Mo/Si multilayers
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2. In-situ non-destructive removal of tin particles by low-energy plasma for imitation of EUV optical mirrors self-cleaning;Vacuum;2023-06
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