The influence of pressure and magnetic field on the deposition of epitaxial TiBx thin films from DC magnetron sputtering-Reference-Cited by-同舟云学术

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The influence of pressure and magnetic field on the deposition of epitaxial TiBx thin films from DC magnetron sputtering

Published:2020-07 Issue: Volume:177 Page:109355
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Nedfors Nils,Primetzhofer Daniel,Zhirkov Igor,Palisaitis Justinas,Persson Per O.Å.,Greene J.E.,Petrov Ivan,Rosen Johanna

Funder

KAW

Swedish Government Strategic Research Area

Linköping University

VR-RFI

Swedish Foundation for Strategic Research

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference30 articles.

1. Self-organized nanocolumnar structure in superhard TiB2 thin films;Mayrhofer;Appl. Phys. Lett.,2005

2. Nanostructured titanium, zirconium and hafnium diborides: the synthesis, properties, size effects and stability;Andrievski;Russ. Chem. Rev.,2015

3. Material properties of titanium diboride;Munro;J. Res. Natl. Inst. Stand.,2000

4. Low temperature deposited titanium boride thin films and their application to surface engineering of microscale mold inserts;Mu;Microsyst. Technol.,2012

5. Influence of pulse frequency and bias on microstructure and mechanical properties of TiB2 coatings deposited by high power impulse magnetron sputtering;Nedfors;Surf. Coating. Technol.,2016

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1. Influence of co-sputtering AlB ₂ to TaB ₂ on stoichiometry of non-reactively sputtered boride thin films;Materials Research Letters;2024-06-02

2. Tribological Properties of Hard TiB2 Thin Films Prepared at Low Temperatures Using HiPIMS;Coatings;2024-04-16

3. High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pulse length and peak current density;Vacuum;2024-04

4. Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy;Journal of Vacuum Science & Technology A;2024-01-29

5. Oxidation Resistance and Thermal Stability of Crystalline Alb2 Thin Films;2024

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