Low temperature deposited titanium boride thin films and their application to surface engineering of microscale mold inserts-Reference-Cited by-同舟云学术

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Low temperature deposited titanium boride thin films and their application to surface engineering of microscale mold inserts

Published:2012-03-13 Issue:5 Volume:18 Page:667-677
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Mu Yang,Chen Ke,Meng W. J.,Mei Fanghua

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-012-1465-5.pdf

Reference29 articles.

1. Berger M, Hogmark S (2002) Evaluation of TiB2 coatings in sliding contact against aluminum. Surf Coat Technol 149:14

2. Berger M, Larsson M, Hogmark S (2000) Evaluation of magnetron-sputtered TiB2 intended for tribological applications. Surf Coat Technol 124:253

3. Cao DM, Meng WJ (2004) Microscale compression molding of Al with surface engineered LiGA inserts. Microsyst Technol 10:662

4. Cao DM, Wang T, Feng B, Meng WJ, Kelly KW (2001) Amorphous hydrocarbon based thin films for high-aspect-ratio MEMS applications. Thin Solid Films 398(399):553

5. Cao DM, Meng WJ, Simko SJ, Doll GL, Wang T, Kelly KW (2003) Conformal deposition of Ti-containing hydrocarbon coatings over LiGA fabricated high-aspect-ratio micro-scale structures and tribological characteristics. Thin Solid Films 429:46

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1. High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pulse length and peak current density;Vacuum;2024-04

2. Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy;Journal of Vacuum Science & Technology A;2024-01-29

3. On the nature of planar defects in transition metal diboride line compounds;Materialia;2022-08

4. Synthesis and characterization of TiBx (1.2 ≤ x ≤ 2.8) thin films grown by DC magnetron co-sputtering from TiB2 and Ti targets;Surface and Coatings Technology;2022-03

5. On the Nature of Planar Defects in Transition Metal Diboride Line Compounds;SSRN Electronic Journal;2022

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