Sputter deposition with powder targets: An overview
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference181 articles.
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4. Energy deposition at the substrate in a magnetron sputtering system;Ekpe,2008
5. Reactive sputter deposition of tin layers: modelling the growth by characterization of particle fluxes towards the substrate;Mahieu;J. Phys. D: Appl. Phys.,2009
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