Simulation and experimental research on the parameter distribution of low-pressure Ar/O 2 inductivly coupled plasma
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference19 articles.
1. Experimental and theoretical characterization of an inductively coupled plasma source
2. Three-dimensional computation of reduction in Radar cross section using plasma shielding
3. FDTD simulations on radar cross sections of metal cone and plasma covered metal cone
4. A large volume uniform plasma generator for the experiments of electromagnetic wave propagation in plasma
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1. Numerical simulation of inductively coupled Ar/O<sub>2</sub> plasma;Acta Physica Sinica;2024
2. Investigation on charged particles in inductively coupled Ar/O2 plasmas: The role of Ar proportion;Physics of Plasmas;2022-11
3. Nonthermal plasma: An emerging innovative technology for the efficient removal of cooking fumes;Journal of Environmental Chemical Engineering;2022-06
4. Investigation on the Parameters Distribution and Electromagnetic Scattering of Radome Inductively Coupled Plasma;IEEE Transactions on Antennas and Propagation;2021-12
5. An experimentally verified three-dimensional non-stationary fluid model of unloaded atmospheric pressure inductively coupled plasmas;Journal of Physics D: Applied Physics;2020-08-12
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