External magnetic field effect on the sheath dynamics and implantation profiles in the vicinity of a long step shaped target in plasma immersion ion implantation
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
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1. Dynamics of magnetized plasma sheaths around a trench;Physics of Plasmas;2016-08
2. Ion temperature and gas pressure effects on the magnetized sheath dynamics during plasma immersion ion implantation;Physics of Plasmas;2016-03
3. Influence of ion-neutral collision parameters on dynamic structure of magnetized sheath during plasma immersion ion implantation;Journal of Theoretical and Applied Physics;2016-01-14
4. Nitrogen mass transfer models for plasma-based low-energy ion implantation;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2015-03
5. A hybrid model for simulation of secondary electron emission in plasma immersion ion implantation under different pulse rise time;Physics of Plasmas;2015-02
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