Influence of ion-neutral collision parameters on dynamic structure of magnetized sheath during plasma immersion ion implantation
Author:
Publisher
Springer Science and Business Media LLC
Subject
Physics and Astronomy (miscellaneous)
Link
http://link.springer.com/content/pdf/10.1007/s40094-015-0199-z.pdf
Reference20 articles.
1. Conrad, J.R., Radtke, J., Dodd, R.A., Worzala, F.J.: Plasma source ion implantation technique for surface modification of materials. Appl. Phys. 62, 4591 (1987)
2. Tendys, J., Donnelly, I.J., Kenny, M.J., Pollock, J.T.A.: Plasma immersion ion implantation using plasmas generated by radio frequency technique. Appl. Phys. Lett. 53, 2143–2145 (1988)
3. Qin, S., McGruer, N., Chan, C., Warner, K.: Plasma immersion ion implantation doping using a microwave multipolar bucket plasma. IEEE Trans. Electron Devices 39(10), 2354–2358 (1992)
4. Qin, S., Ghan, C.: Plasma Immersion Ion implantation doping experiments for microelectronics. J. Vac. Sci. Technol. B 12(2), 962–968 (1994)
5. Cheung, N.W.: Plasma immersion ion implantation for ULSI procrssing. Nucl. Instrum. Meth. Phys. Res. B 55, 811–820 (1991)
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