A hybrid model for simulation of secondary electron emission in plasma immersion ion implantation under different pulse rise time
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Published:2015-02
Issue:2
Volume:22
Page:023513
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ISSN:1070-664X
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Container-title:Physics of Plasmas
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language:en
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Short-container-title:Physics of Plasmas
Author:
Navab Safa N.,Ghomi H.
Subject
Condensed Matter Physics
Cited by
2 articles.
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