Effect of reducing impurity concentration of microcrystalline silicon thin films for solar cells using radio frequency hollow electrode enhanced glow plasma-Reference-Cited by-同舟云学术

Effect of reducing impurity concentration of microcrystalline silicon thin films for solar cells using radio frequency hollow electrode enhanced glow plasma

Published:2014-03 Issue: Volume:101 Page:125-129
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Tabuchi T.,Toyoshima Y.,Takashiri M.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference23 articles.

1. Comprehensive study of microcrystalline silicon solar cells deposited at high rate using 13.56 MHz plasma-enhanced chemical vapor deposition

2. Material and solar cell research in microcrystalline silicon

3. A high efficiency thin film silicon solar cell and module

4. On the Way Towards High Efficiency Thin Film Silicon Solar Cells by the “Micromorph” Concept

5. Spectroscopy of hollow anode discharge

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