Low-temperature deposition of iridium thin films by pulsed laser deposition
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference17 articles.
1. Epitaxial (100) iridium on A-plane sapphire: A system for wafer-scale diamond heteroepitaxy
2. Iridium thin films deposited by radio-frequency magnetron sputtering
3. New MOCVD precursor for iridium thin films deposition
4. Low temperature deposition of metal films by metal chloride reduction chemical vapor deposition
5. Iridium precursor pyrolysis and oxidation reactions and direct liquid injection chemical vapor deposition of iridium films
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