High-rate magnetron deposition of CuOx films in the metallic mode enhanced by radiofrequency inductively coupled plasma source

Author:

Sidelev Dmitrii V.ORCID,Voronina Ekaterina D.,Grudinin Vladislav A.

Funder

Russian Science Foundation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference30 articles.

1. Rare-earth oxide thin films for gate dielectrics in microelectronics;Leskelä;J. Alloys Compd.,2006

2. Synthesis and characterization of copper doped zinc oxide thin films for CO gas sensing;Bharadwaj;Mater. Today,2018

3. Effect of ion implantation on the physical and mechanical properties of Ti-Si-N multifunctional coatings for biomedical applications;Shypylenko;Mater. Des.,2016

4. Synthesis and characterization of the bulk YBCO-target of superconducting material;Hasan;Mater. Today,2021

5. Deposition of CuO thin film prepared by DC reactive magnetron sputtering, Mater;Sangwaranatee;Today Off.,2018

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