Author:
Kim Jong-Ahn,Lee Jae Yong,Kang Chu-Shik,Woo Jae Heun
Subject
Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Reference20 articles.
1. Smart factory of industry 4.0: Key technologies, application case, and challenges, IEEE;Chen;Access,2017
2. Characterization of a self-calibrating, high-precision, stacked-stage, vertical dual-axis goniometer;Mendenhall;Metrologia,2016
3. Development of a high precision coplanar stage by using miniature Michelson interferometer;Fan;Int. J. Precis. Eng. Manuf.,2014
4. Precision machine tool X-Y stage utilizing a planar air bearing arrangement;Erkorkmaz;CIRP Ann. Manuf. Technol.,2010
5. Five-degrees-of-freedom measurement system based on a monolithic prism and phase sensitive detection technique;Huang;Appl. Opt.,2013
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