Author:
Fan Kuang-Chao,Zhou Hao,Li Ruijun
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering
Reference12 articles.
1. Fan, K. C., Fei, Y. T., Yu, X. F., Chen, Y. J., Wang, W. L., et al., “Development of a Low-Cost Micro-CMM for 3D Micro/Nano Measurements,” Measurement Science and Technology, Vol. 17, No. 3, pp. 524–532, 2006.
2. Fan, K. C., Cheng, F., Wang, H. Y., and Ye, J. K., “The System and the Mechatronics of a Pagoda Type Micro-CMM,” International Journal of Nanomanufacturing, Vol. 8, No. 1, pp. 67–86, 2012.
3. Cheng, F. and Fan, K. C., “Linear Diffraction Grating Interferometer with High Alignment Tolerance and High Accuracy,” Applied Optics, Vol. 50, No. 22, pp. 4550–4556, 2011.
4. Fan, K. C., Zhang, Y. L., Miao, J. W., and Cheng, F., “Error Compensation of Grating Interferometer due to Angular Error of Linear Stage,” Proc. of IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), pp. 428–431, 2012.
5. Kramar, J. A., “Nanometre Resolution Metrology with the Molecular Measuring Machine,” Measurement Science and Technology, Vol. 16, No. 11, pp. 2121–2128, 2005.
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