Ion beam synthesis of buried CoSi2-structures
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference11 articles.
1. Mesotaxy: Single‐crystal growth of buried CoSi2layers
2. D. Lenssen, Diploma Thesis, RWTH Aachen, 1996
3. Stencil masks for high energy ion projection
4. Prospects of ion projection techniques for maskless implantation at high ion energies
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