Author:
Weidenmüller U.,Meijer J.,Stephan A.,Bukow H.H.,Rolfs C.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
8 articles.
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1. Proton Beam Writing: A New 3D Nanolithographic Technique;Ion Beams in Nanoscience and Technology;2009
2. High-energy ion projection for deep ion implantation as a low cost high throughput alternative for subsequent epitaxy processes;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2004
3. Ion beam synthesis of buried CoSi2-structures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-04
4. Heavy ion projection beam system for material modification at high ion energy;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2002
5. White electroluminescent nanostructures in silicon fabricated using focused ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-07