Author:
Stephan A.,Meijer J.,Bukow H.H.,Rolfs C.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
7 articles.
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1. The use of solenoid lenses in a two-stage nuclear microprobe probe-forming system;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-04
2. Microprobe as implanter for semiconductor devices;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-09
3. Stencil masks for high energy ion projection;Microelectronic Engineering;1999-05
4. High energy implantation by ion projection;Microelectronic Engineering;1998-03
5. Investigation of the resolution affecting parameters of a nuclear microprobe using a solenoid lens;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-06