Author:
Park Jeong Hoon,Kim Sang Jin,Lee Jeong Ho,Yoo Chang Joon,Kang Hyo Jin,Lee Byung Cheol,Jeong Jae Goan
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference17 articles.
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3. Formation of Ni silicide from Ni(Au) films on (111)Si
4. Ultrathin silicide formation for ULSI devices
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