Recent results in ion beam induced charge microscopy: Unconnected junction contrast and an assessment of single contact IBIC-Reference-Cited by-同舟云学术

Recent results in ion beam induced charge microscopy: Unconnected junction contrast and an assessment of single contact IBIC

Published:1997-07 Issue:1-4 Volume:130 Page:503-506
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Osipowicz T.,Sanchez J.L.,Orlić I.,Watt F.,Kolachina S.,Ong V.K.S.,Chan D.S.H.,Phang J.C.H.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference12 articles.

1. A theory of ion beam induced charge collection

2. Ion-beam-induced charge-collection imaging of CMOS ICs

3. Applications of nuclear microprobes in the semiconductor industry

4. Microcircuit imaging using an ion‐beam‐induced charge

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1. Single contact beam induced current phenomenon for microelectronic failure analysis;Microelectronics Reliability;2003-09

2. IBIC analysis of high-power devices;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-07

3. Analysis of high-power devices using proton beam induced currents;Microelectronics Reliability;2000-08

4. Can physical analysis aid in device characterization?;Journal of Crystal Growth;2000-03

5. The nuclear microprobe: a unique instrument;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-07