Nuclear reaction analysis of deuterium in ultrathin films of SiO2 on Si
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference12 articles.
1. The Physics and Chemistry of SiO2 and the Si-SiO2 Interface-3;Buchanan,1996
2. Reliability of thin SiO2
3. Annealing of surface states in polycrystalline‐silicon–gate capacitors
4. A Framework for Understanding Radiation-Induced Interface States in SiO2 MOS Structures
5. Reduction of hot electron degradation in metal oxide semiconductor transistors by deuterium processing
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Nuclear and Optical Analyses of MOS Devices;Acta Physica Polonica A;2013-05
2. Unraveling the role of SiC or Si substrates in water vapor incorporation in SiO2 films thermally grown using ion beam analyses;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-02
3. Room temperature interactions of water vapor with HfO2 films on Si;Applied Physics Letters;2006-05-15
4. Interaction of HfO2∕SiO2∕Si structures with deuterium gas;Applied Physics Letters;2006-01-23
5. Characterization of HfO2/Si Exposed to Water Vapor at Room Temperature;MRS Proceedings;2006
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3