Reliability of thin SiO2
Author:
Publisher
IOP Publishing
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0268-1242/9/i=5/a=002/pdf
Reference76 articles.
1. Effects of poly depletion on the estimate of thin dielectric lifetime
2. Fowler‐Nordheim Tunneling into Thermally Grown SiO2
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