Etching of amorphous Al2O3 produced by ion implantation-Reference-Cited by-同舟云学术

Etching of amorphous Al2O3 produced by ion implantation

Published:1997-05 Issue: Volume:127-128 Page:596-598
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

McHargue Carl J.,Hunn John D.,Joslin Debra L.,Alves E.,da Silva M.F.,Soares J.C.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference10 articles.

1. Proc. Ion Beam Modification of Materials-78;Ross,1980

4. Proc. 5th Conf. on Solid State Devices;Akasaka,1974

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