Study on emission yields of negative- and positive-ion induced secondary electron from thin SiO2 film
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference16 articles.
1. Negative‐ion source for implantation and surface interaction of negative‐ion beams (invited)
2. Negative-ion implantation technique
3. Energy Distribution and Yield Measurement of Secondary Electrons to Evaluate the Equilibrium Charging Voltage of an Isolated Electrode during Negative-Ion Implantation
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