Negative‐ion source for implantation and surface interaction of negative‐ion beams (invited)
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1144984
Reference8 articles.
1. Negative ion beam technology for materials science (invited)
2. A heavy negative ion sputter source: Production mechanism of negative ions and their applications
3. Mass‐separated negative‐ion‐beam deposition system
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3. Electrochemical Reactions of Ionic Liquid in Vacuum and Their Influence on Ion-Beam Production by Electrospray;Journal of The Electrochemical Society;2020-11-25
4. Negative ion production in energetic O − and C − ions scattering on HOPG;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-09
5. Beam Characteristics of Positively and Negatively Charged Droplets Generated by Vacuum Electrospray of an Ionic Liquid;Japanese Journal of Applied Physics;2012-03-01
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