Author:
MAES H.,VANDERVORST W.,VAN OVERSTRAETEN R.
Cited by
5 articles.
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1. Materials Processing;Ion Beams in Materials Processing and Analysis;2012
2. Process Simulation;Microelectronic Materials and Processes;1989
3. Process Modeling;Analysis and Simulation of Semiconductor Devices;1984
4. On the influence of crater edges and neutral beam component on impurity profiles from raster scanning SIMS;Surface and Interface Analysis;1982-12
5. Possibilities of Ion Implantation in Silicon Solar Cell Manufacturing;Fourth E.C. Photovoltaic Solar Energy Conference;1982