Copyrolysis of AsH3 and PH3 in the epitaxial III-V alloys
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference17 articles.
1. Thermodynamic properties of AsH3 and its subhydrides
2. Equilibrium gas-phase composition and thermodynamic properties including subhydrides in the pyrolysis of AsH3 and PH3
3. Equilibrium gas-phase composition of cracked AsH3 and PH3
4. Thermodynamic interpretation of quaternary (InGaAsP) layer uniformity grown by low‐pressure metalorganic vapor phase epitaxy
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Calculational Evaluation of the Adsorption–Desorption Behavior of Pyrolysis Products in GaAsxP1 – x Metalorganic Vapor Phase Epitaxy;Inorganic Materials;2022-04
2. A model for calculating the composition of GaAs x P1–x solid solutions under metalorganic vapor phase epitaxy conditions;Inorganic Materials;2017-04
3. Unequal P Distribution in Nanowires and the Planar Layer during GaAsP Growth on GaAs {111}B by Metal–Organic Chemical Vapor Deposition;The Journal of Physical Chemistry C;2013-09-04
4. Thermodynamic Analysis of GaAs1 − x P x Vapor Phase Epitaxy;Journal of The Electrochemical Society;1996-08-01
5. On the nucleation and composition analysis of InAs1−xPx during vapour phase epitaxial growth;Journal of Crystal Growth;1996-05
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