A novel MOVPE reactor with a rotating substrate
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference5 articles.
1. Instrumental aspects of atmospheric pressure MOVPE growth of InP and InP: GaInAsP heterostructures
2. OMVPE of GaInAs on a spinning substrate
3. Vapor levitation epitaxy: system design and performance
4. D. Grützmacher, private communication, 1988.
5. P. Roentgen, private communication, 1988.
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