Doping efficiency and plasma analysis of a nitrogen electron cyclotron resonance plasma
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference22 articles.
1. Low‐resistivity p‐type ZnSe:N grown by molecular beam epitaxy using a nitrogen free‐radical source
2. Atomic nitrogen production in nitrogen-plasma sources used for the growth of ZnSe : N and related alloys by molecular-beam epitaxy
3. Atomic nitrogen production in a molecular-beam epitaxy compatible electron cyclotron resonance plasma source
4. Molecular-beam epitaxial growth of p- and n-type ZnSe homoepitaxial layers
5. Properties of GaN films grown under Ga and N rich conditions with plasma enhanced molecular beam epitaxy
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Influence of plasma-activated nitrogen species on PA-MOCVD of InN;Applied Physics Letters;2019-11-25
2. Indium Nitride Film Growth by Metal Organic Chemical Vapor Deposition with Nitrogen Activation in Electron Cyclotron Resonance Discharge Sustained by 24 GHz Gyrotron Radiation;Japanese Journal of Applied Physics;2013-08-01
3. Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry;Applied Physics Letters;2007-04-23
4. Growth and doping of Te-based II–VI layers and quantum structures by molecular beam epitaxy;Handbook of Advanced Electronic and Photonic Materials and Devices;2001
5. In situ reflectance difference spectroscopy of p-type ZnTe:N grown by MBE;Thin Solid Films;2000-09
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3