Facetted MBE growth of (GaAl)As on RIE patterned surfaces
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference12 articles.
1. Advances in molecular beam epitaxy (MBE)
2. Buried heterostructure laser fabricated using reactive ion etching and gas source molecular beam epitaxy
3. Threshold current reduction in patterned quantum well semiconductor lasers grown by molecular beam epitaxy
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5. In situ overgrowth on GaAs patterned by focused-ion-beam-assisted Cl2 etching
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