Thermally driven micromechanical bridge resonators-Reference-Cited by-同舟云学术

Thermally driven micromechanical bridge resonators

Published:1994-04 Issue:1-3 Volume:42 Page:680-684
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Burrer Chr.,Esteve J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

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4. Study of electrochemical etch-stop for high-precision thickness control of silicon membranes;Kloeck;IEEE Trans. Electron Devices,1989

5. Resonating microbridge mass flow sensor;Bouwstra;Sensors and Actuators,1990

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