Author:
Bouwstra Siebe,Legtenberg Rob,Tilmans Harrie A.C.,Elwenspoek Miko
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. High-precision, high-performance mass flow sensor with integral laminar flow micro-channels;Petersen,11141985
2. A highly sensitive chip microtransducer for air flow and differential pressure sensing applications;Johnson;Sensors and Actuators,1987
3. An integrated gas flow sensor with pulse-modulated output;Stemme,251987
4. The fabrication of integrated mass flow controllers;Esashi,251987
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