Author:
Bouwstra Siebe,Legtenberg Rob,Tilmans Harrie A.C.,Elwenspoek Miko
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. High-precision, high-performance mass flow sensor with integral laminar flow micro-channels;Petersen,11141985
2. A highly sensitive chip microtransducer for air flow and differential pressure sensing applications;Johnson;Sensors and Actuators,1987
3. An integrated gas flow sensor with pulse-modulated output;Stemme,251987
4. The fabrication of integrated mass flow controllers;Esashi,251987
Cited by
70 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献