Effect of overheat and direct flow loading on the MEMS bistable flow sensor-Reference-Cited by-同舟云学术

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Effect of overheat and direct flow loading on the MEMS bistable flow sensor

Published:2024-07 Issue: Volume:372 Page:115312
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Litvinov Ivan^ORCID,Refaeli Dan,Liberzon Alex,Krylov Slava

Publisher

Elsevier BV

Reference39 articles.

1. Micro-electro-mechanical-systems (MEMS) and fluid flows;Ho;Annu. Rev. Fluid Mech.,1998

2. MEMS-based smart gas metering for Internet of Things;Dong;IEEE Internet Things J.,2017

3. Progress in wearable electronics/photonics—Moving toward the era of artificial intelligence and internet of things;Shi;InfoMat,2020

4. MEMS-based gas flow sensors;Wang;Microfluid Nanofluid,2009

5. Micromachined thermal flow sensors—A review;Kuo;Micromachines,2012

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Piezoresistive snap-through detection for bifurcation-based MEMS sensors;Applied Physics Letters;2024-06-03

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