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MEMS-based gas flow sensors

Published:2009-01-08 Issue:3 Volume:6 Page:333-346
ISSN:1613-4982
Container-title:Microfluidics and Nanofluidics
language:en
Short-container-title:Microfluid Nanofluid

Author:

Wang Yu-Hsiang,Chen Chang-Pen,Chang Chih-Ming,Lin Chia-Pin,Lin Che-Hsin,Fu Lung-Ming,Lee Chia-Yen

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s10404-008-0383-4.pdf

Reference36 articles.

1. Anderson JD (1991) Fundamentals of aerodynamics, 2nd edn. McGraw-Hill, New York

2. Berberig O, Nottmeyer K, Mizuno J, Kanai Y (1998) The Prandtl micro flow sensor (PMFS): a novel silicon diaphragm capacitive sensor for flow-velocity measurement. Sens Actuators A 66:93–98

3. Bouwstra S, Legtenberg R, Tilmans HAC, Elwenspoek M (1990) Resonating microbridge mass flow sensor. Sens Actuators A 21:332–335

4. Chen J, Fan Z, Zou J, Engel J, Liu C (2003) Two-dimensional micromachined flow sensor array for fluid mechanics studies. J Aerosp Eng 16:85–97

5. Ebefors TR, Lvesten EK, Stemme G (1998) Three dimensional silicon triple-hot-wire anemometer based on polyimide joints. In: IEEE international workshop on micro electron mechanical system (MEMS ’98), Heidelberg, Germany, pp 120–126

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