Author:
Ferrari V.,Ghisla A.,Marioli D.,Taroni A.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference32 articles.
1. Resonant sensors and applications;Hauptmann;Sens. Actuators A,1991
2. R.T. Howe, Resonant Microsensors, Proc. of the 4th International Conference on Solid-State Sensors and Actuators (Tranducers ’87), Tokyo, Japan, 2–5 june, 1987, pp. 843–848.
3. M. Esashi, “Resonant sensors by silicon micromachining”, Proc. IEEE Int. Frequency Control Symp., 1996, pp. 609–614.
4. Resonant silicon structures;Buser;Sens. Actuators,1989
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